Manufactured based on quartz glass, this glass can be easily processed into various forms. Developed by applying the manufacturing technologies for very high purity quartz glass, it has extremely low thermal expansion, and is optimal for cutting-edge applications which require thermal expansion to be minimized.

Applications

  • Lithography equipment stages
  • Low thermal expansion glass AZ was derived from our ultrahigh-purity synthetic quartz manufacturing technology. Being developed using our synthetic quartz manufacturing technology, the glass, like synthetic quartz, can be readily processed into a variety of shapes. AGC’s expertise in precision polishing permits assurance of low defect density. Zero-expansion glass is ideal for applications requiring extremely low thermal expansion, including standards for thermal property measurement, spacers for light resonators, and lithography equipment stages.

    Coefficient of Thermal Expansion

    General Properties

    Grade AZ
    Thermal Properties
    CTE
    ppb/K at 22℃
    <10
    <5
    Heat conductivity
    K(W/m-℃) at 25℃
    1.38
    Specific heat
    J/kg/K at 25℃
    75
    Optical Properties
    Refractive index
    at 589nm
    1.48
    Mechanical Properties
    Density
    g/c
    2.20
    Young’s modulus
    GPa
    68
    Poisson’s ratio
    u
    0.17
    Knoop microhardness
    kg/m
    480
    Electrical Properties
    Bulk resistivity
    Log(Ω*cm) at 200℃
    13.2
    Dielectric constant
    at 1MHz, 25℃
    4
    Chemical Properties
    Chemical durability
    Acid resistance
    <0.05μg/c
    Alkali resistance
    <65μg/c
  • Data is for reference only.
  • Document download

    Product catalog