This product is applied to the touch-panels and cover-glass for mobile electronic devices, such as smart-phones, tablet PCs and notebook PCs. AGC's 0.23mm thin soda-lime glass has already been adopted on the market, and development for thinner glass is also in progress.

Applications

  • Lens material for IC
  • LCD steppers/scanners
  • Photo mask substrate
  • Other optical materials
  • Glass wafer
  • AProduction method and Features of AQ series

    AGC’s Synthetic Fused Silica AQ series is manufactured by the VAD method. The VAD method can reduce Si-OH content, providing customers with synthetic fused silica with the following features.

    Features

  • High transmittance for deep ultraviolet rays with frequencies < 200 nm ranging from the i-ray to KrF, ArF, or Xe excimer lamps, and even for near infrared rays *1
  • Excellent Compaction/Rarefaction and Polarization Induced Birefringence(PIB) characteristics*2
  • Resistant to heat processing around 1000°C*3
  • Excellent durability against high-energy laser beams
  • Thermal expansion as low as 1/10 that of conventional glass
  • High uniformity
  • Very high purity, very low metal impurity content
  • Low OH group content
  • Outstanding chemical resistance
  • Low dielectric loss
  • *DUV-absorption due to electron transition and IR-absorption caused by Si-OH vibration are both reduced.
  • *No rarefaction can be seen in silica glass having low SiOH content such as AGC silica glass. In addition, some ArF excimer laser exposure tests indicate low SiOH containing silica glass has good compaction and PIB characteristics. AGC has installed excimer laser exposure test lines to estimate long-term durability of silica glass. AGC has been diligently researching and developing based on a wealth of the exposure results for a long time.
  • *Decrease in SiOH content makes the Si-O-Si binding network rigid and viscosity high, and consequently makes the heat resistance of silica glass high.
  • Typical Characteristics

    Chemical constitution
    SiO2
    wt(%)
    100
    Thermal properties
    CTE
    ppm/K (50 to 200℃)
    0.6
    Softening Point
    1600
    Annealing Point
    1120
    Strain Point
    1060
    Optical properties
    Refractive Index
    nD
    1.46
    Chemical properties
    Acid Resistance
    mg/cm2
    0.000
    Alkali Resi
    mg/cm2
    0.032
    Mechanical properties
    Density
    g/cm3
    2.20
    Young’s Modulus
    GPa
    74
    Knoop Microhardness
    kg/mm2
    540
    Electrical properties
    Bulk Resistivity
    log(Ω・cm) at 200℃
    12.5
    Dielectric Constant
    at 1MH,R.T.
    4.0
  • Data is for reference only.
  • Transmission Range

    Transmittance in Deep Ultraviolet Range

  • Data is for reference only.
  • Document download

    Product catalog
    Designation
    Features and principal applications
    AQ
    The standard grade of AGCʼs synthetic fused silica glass
    Application example: Photomask Substrate (~KrF), Glass Wafer, Illumination Optics for i-line (365nm
    Life science, UV-LED
    AQ3
    AQ enhanced in uniformity of refractive index
    Application example: Projection Optics for i-line (365nm)
    QJ
    AEnhanced purity AQ, with guaranteed low metallic impurity content
    Application example: Glass wafer for High-temperature and High-purity Process, HTPS, Life science applications
    AQ2
    High transmittance in vacuum ultraviolet and near infrared
    Application example: Optical material for Xe excimer lamp (172nm)
    AQT
    High resistance against deep ultraviolet excimer laser beams along with highly uniform refractive index
    Application example: Projection Optics for ArF excimer laser (193nm)
    AQR
    High resistance against deep ultraviolet excimer laser beams
    Application example: Illumination Optics for ArF excimer laser (193nm)
    QC‐i
    High transmittance for deep ultraviolet excimer laser beams and low birefringence
    Application example: Photomask Substrate for ArF immersion system
    AQ4
    High resistance and high transmittance in a range from UV to DUV
    Application example: Window material for Low-k wiring device, etc